| 发明名称 |
Optical irradiation equipment and optical irradiation method |
| 摘要 |
An optical irradiation equipment provided with a cage body having an UV radiation transmission window, and an excimer lamp which is arranged in an interior of said cage body, wherein gas flow openings being connected to one of a cooling gas supply mechanism and a cooling gas suction mechanism are provided at a periphery of said UV radiation transmission window.
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| 申请公布号 |
US8522802(B2) |
申请公布日期 |
2013.09.03 |
| 申请号 |
US201113013875 |
申请日期 |
2011.01.26 |
| 申请人 |
NAKASHIMA AKINOBU;SUGIOKA SHINJI;YAMAGUCHI MASANORI;FUJITSUGU HIDEKI;USHIO DENKI KABUSHIKI KAISHA |
发明人 |
NAKASHIMA AKINOBU;SUGIOKA SHINJI;YAMAGUCHI MASANORI;FUJITSUGU HIDEKI |
| 分类号 |
B08B3/00 |
主分类号 |
B08B3/00 |
| 代理机构 |
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代理人 |
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