| 摘要 |
PURPOSE: A table unit using a non-contact bearing is provided to simplify the whole structure of a table unit by removing a lubricant supply passage. CONSTITUTION: A table unit(10) using a non-contact bearing comprises a base(30), a table(20), and a non-contact bearing part. The table is coupled with the base to be rotated. A workpiece is mounted on the top surface of the table. The non-contact bearing part comprises an air bearing(40) and a magnetic bearing(50) and couples the base and the table to be rotated form non-contact state. The air bearing forms an air layer between the base and the table. The magnetic bearing separates the base and the table by using magnetic force. |
