MEMS scanning micromirror

摘要

A MEMS scanning micromirror including a mirror body 50, the mirror body 50 having a rotation axis 58 with a pair of extension bars 56 parallel to the rotation axis 58; a frame 60 forming a mirror recess 62 with a recess periphery 64, the frame 60 having a pair of opposed frame bars 66 on the recess periphery 64 along the rotation axis 58; a pair of cantilever beam assemblies 70, each of the pair of cantilever beam assemblies 70 being fixed to one of the pair of opposed frame bars 66 and coupled to one end of the pair of extension bars 56; and a pair of vertical support beams 40 connected between each of the pair of opposed frame bars 66 to the mirror body 50 along the rotation axis 58.