| 摘要 |
PURPOSE: A tray and die cleaning apparatus is provided to dehydrate water remaining on an object by a centrifugal force generated by rotation, thereby saving drying time. CONSTITUTION: A cleaning member (40) includes a first cleaning bath (41) and a second cleaning bath (42). A rinse and drying member (70) includes a rinse and drying bath (71), a steam generator, and a vacuum pump. An object supplied from the cleaning member is rinsed and dried in the rinse and drying bath. The steam generator is connected to the rinse and drying bath. The vacuum pump forms vacuum. |
