Heat Shield for Manufacturing Single Crystal Ingot, Single Crystal Ingot Grower including the same and Method for removing a contaminant of Heat Shield for Manufacturing Single Crystal Ingot

摘要

PURPOSE: A heat shield for growing a single crystal ingot, a single crystal ingot growing device, and a method for removing the contamination of the heat shield are provided to efficiently remove oxide by adopting a structure to separate a side ring from a body. CONSTITUTION: A heat shield(150) is formed in a single crystal growing device chamber(110). A side ring(157) is arranged in a body(155). The side ring is attached to or detached from the body. The body is arranged between heaters(130).