| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method capable of forming various mounting terminals without designing a piezoelectric vibration element matching a base for each of a variety of foot patterns.SOLUTION: The method of manufacturing a piezoelectric device includes a bonding step (S131) for bonding a piezoelectric wafer and a first wafer, and a step (S132) for preparing a first terminal mask for forming a pair of hot terminals for power supply and for vibration frequency output formed on the bottom face, and a second terminal mask for forming a pair of hot terminals and an earth terminal. The manufacturing method further includes a selection step (S141) for selecting an arrangement of the first terminal mask and an arrangement of the second terminal mask on the bottom face of the first wafer after the bonding step, and steps (S142, S143, S144) for forming a bottom face having a power supply terminal and an output terminal via the first terminal mask, or forming a bottom face having a power supply terminal, an output terminal and an earth terminal via the second terminal mask following the selection step. |
