发明名称 DIE SORTER
摘要 PURPOSE: A die sorter is provided to improve space efficiency by reducing the size of a picker body part. CONSTITUTION: A picker body part (400) includes a first driving part (420) and a third driving part (430). The first driving part moves a picker repeatedly between a chuck table and a tray. The third driving part moves the picker up and down. A second driving part (410) is formed in front of the picker body part. The second driving part moves the picker backwards and forwards.
申请公布号 KR20130097034(A) 申请公布日期 2013.09.02
申请号 KR20120018730 申请日期 2012.02.23
申请人 HANMISEMICONDUCTOR CO., LTD. 发明人 KO, DAE JUN;CHOI, HOON JAE
分类号 H01L21/02 主分类号 H01L21/02
代理机构 代理人
主权项
地址