发明名称 SUBSTRATE GROOVING TOOL AND GROOVING DEVICE
摘要 PROBLEM TO BE SOLVED: To enable accurate grooving without adjusting a machining position, even when a tool has been replaced.SOLUTION: This grooving tool 2 is held by a holder 17, forms a groove in a machining object substrate by relatively moving the substrate together with the holder 17, and includes a tool body 36 and a cutting edge part 37. The tool body 36 has a contact surface 36a contacting the holder 17 and is held by the holder 17. The cutting edge part 37 is formed at an end of the tool body 36, has a reference plane 37a continuing from the contact surface 36a and formed flush with the contact surface 36a, and has a predetermined width from the reference plane 37a.
申请公布号 JP2013169600(A) 申请公布日期 2013.09.02
申请号 JP20120032895 申请日期 2012.02.17
申请人 MITSUBOSHI DIAMOND INDUSTRIAL CO LTD 发明人 SOYAMA MASANOBU
分类号 B23D13/00;B23D1/18;B23D7/06;H01L31/04 主分类号 B23D13/00
代理机构 代理人
主权项
地址