| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric device which prevents peeling of an electrode formed by electroless plating, and to provide a manufacturing method of the piezoelectric device.SOLUTION: A piezoelectric device (100) includes: a piezoelectric vibration piece (130) including an excitation electrode (131) and an extraction electrode (132) extracted from the excitation electrode; a base plate (120) where a connection electrode (123) electrically connected with the extraction electrode is formed on one main surface and a mounting terminal (124) is formed on the other main surface; and a lid plate (110). Step parts (127), recessed to the one main surface side, and castellations (126), penetrating through the base plate from the other main surface to the one surface, are formed on facing sides on the other main surface of the base plate. A wiring electrode (125), extracted from the mounting terminal to the one main surface of the base plate, is formed at a part of the step part and the castellations. The wiring electrode and the mounting terminal are formed by a metal film (153) and an electroless plated film (151) formed on the metal film by electroless plating. |
