发明名称 |
DICING-DIE BONDING TAPE AND MANUFACTURING METHOD OF SEMICONDUCTOR CHIP WITH ADHESIVE LAYER |
摘要 |
PROBLEM TO BE SOLVED: To provide a dicing-die bonding tape which allows an adhesive layer to be accurately cut off so that pickup properties of a semiconductor chip with the adhesive layer can be improved.SOLUTION: A dicing-die bonding tape 1 comprises: an adhesive layer 3; a base material layer 4 laminated on one surface 3a of the adhesive layer 3; and a dicing layer 5 laminated on a surface 4b of the base material layer 4 on a side opposite to the adhesive layer 3 side. The breaking elongation of the base material layer 4 at 23°C exceeds 50%. The tensile load of the base material layer 4 at 23°C and at an elongation of 10% is 4 N or lower. The tensile load of a laminate of the base material layer 4 and the dicing layer 5 at 23°C and at an elongation of 10% is equal to or lower than 1.5 times the tensile load of the dicing layer 5 at 23°C and at an elongation of 10%. |
申请公布号 |
JP2013172021(A) |
申请公布日期 |
2013.09.02 |
申请号 |
JP20120035385 |
申请日期 |
2012.02.21 |
申请人 |
SEKISUI CHEM CO LTD |
发明人 |
TAKEBE YOSHIYUKI |
分类号 |
H01L21/301;C09J7/02;H01L21/52 |
主分类号 |
H01L21/301 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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