发明名称 CHIP PICKUP DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a chip pickup device which prevents chips from dropping from a sheet or being broken, by preventing chips around a chip to be picked up from being lifted.SOLUTION: When a chip is pushed up to such a height by a taper part of a push-up pin that it can be peeled, a diameter of the taper part of the push-up pin in a position of an adhesive sheet placing surface is smaller than a length obtained by subtracting twice a length of a thickness of the adhesive sheet from the sum of lengths of sides in respective directions of the chip and twice a length of an interval between adjacent chips.
申请公布号 JP2013172042(A) 申请公布日期 2013.09.02
申请号 JP20120035694 申请日期 2012.02.22
申请人 MITSUBISHI ELECTRIC CORP 发明人 KATO MITSUHIRO
分类号 H01L21/67;H01L21/301;H01L21/52 主分类号 H01L21/67
代理机构 代理人
主权项
地址