| 摘要 |
PROBLEM TO BE SOLVED: To provide a drawing apparatus advantageous to perform accurate drawing.SOLUTION: This drawing apparatus is to perform drawing on a substrate by a charged particle beam, and has a deflector for scanning the charged particle beam on the substrate by deflecting it, a detection part 20 including a shielding part 21 for shielding the charged particle beam and detecting intensity of the charged particle beam which is not shielded by the shielding part 21, and a processing part for processing a signal obtained in the detection part 20 by scanning the charged particle beam against the detection part 20 in the scanning direction by the deflector. The effective region of the shielding part 21 has a shape in which the position of an end part in a scanning direction continuously changes in a direction perpendicular to the scanning direction. In addition, the processing part finds a relation between a command value to the reflector and a scanning position of the charged particle beam by processing a signal relating to a plurality of positions of the end part. |
