| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate rotating/holding device properly holding a substrate, and a substrate processing device.SOLUTION: According to an embodiment, there is provided a substrate rotating/holding device. The substrate rotating/holding device includes: a substrate holding part sandwiching an outer peripheral end of a disk-like substrate with a plurality of holding members to hold the substrate; and a rotation drive part allowing the substrate holding part to rotate. In each of the holding members, a contact surface with the substrate is a concave surface. |
