发明名称 PHOTOPOLYMERIZABLE COMPOSITION
摘要 PROBLEM TO BE SOLVED: To provide a curable composition for imprinting having excellent patternability.SOLUTION: There are provided a photocurable composition comprising (A) a polymerizable compound and (B) a photopolymerization initiator expressed by general formula (I) provided that the zinc content and aluminum content of the composition are <5 ppb each; and a pattern-forming method including a step to form a pattern-forming layer by applying the photocurable composition to a substrate, a step to bond a mold with pressure on a surface of the pattern-forming layer, and a step to irradiate the pattern-forming layer with light.
申请公布号 JP2013170227(A) 申请公布日期 2013.09.02
申请号 JP20120035193 申请日期 2012.02.21
申请人 FUJIFILM CORP 发明人 ITO TAKAYUKI;KODAMA KUNIHIKO;ENOMOTO YUICHIRO;TARUYA SHINJI
分类号 C08F20/10;B29C59/02;C08F2/50;H01L21/027 主分类号 C08F20/10
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