发明名称 |
PHOTOPOLYMERIZABLE COMPOSITION |
摘要 |
PROBLEM TO BE SOLVED: To provide a curable composition for imprinting having excellent patternability.SOLUTION: There are provided a photocurable composition comprising (A) a polymerizable compound and (B) a photopolymerization initiator expressed by general formula (I) provided that the zinc content and aluminum content of the composition are <5 ppb each; and a pattern-forming method including a step to form a pattern-forming layer by applying the photocurable composition to a substrate, a step to bond a mold with pressure on a surface of the pattern-forming layer, and a step to irradiate the pattern-forming layer with light. |
申请公布号 |
JP2013170227(A) |
申请公布日期 |
2013.09.02 |
申请号 |
JP20120035193 |
申请日期 |
2012.02.21 |
申请人 |
FUJIFILM CORP |
发明人 |
ITO TAKAYUKI;KODAMA KUNIHIKO;ENOMOTO YUICHIRO;TARUYA SHINJI |
分类号 |
C08F20/10;B29C59/02;C08F2/50;H01L21/027 |
主分类号 |
C08F20/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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