| 摘要 |
PROBLEM TO BE SOLVED: To provide a touch probe in which spatial intensity distribution on an optical image sensor varies according to displacement of a feeler.SOLUTION: A touch probe includes a system having a fixing member, a feeler 100 which is held at a static point with respect to the fixing member by one or more elastic elements 400, and is movable from the static position in response to a force due to deviation, and a light source 68 driven by a displacement of the feeler 100 with respect to the fixing member; an optical image sensor for receiving light emitted by the light source 68; and an optical mask 65 interposed on an optical path between the light source 68 and the optical image sensor 61. |
