发明名称 COATING DEVICE OF FUNCTIONAL FILM AND MANUFACTURING METHOD USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a coating device which can form each functional film appropriately, even when forming a plurality of functional films by wet process for a substrate, and to provide a production method of a functional film using the same.SOLUTION: A CPU 250 shifts the landing position of ink from a nozzle 3030G by Pfrom the center Pof an aperture 101G in the X direction, toward an ink droplet having a small width running on a bank 105, out of adjoining ink sumps 1060R, 1060B. The amount of nozzle movement P-P={(D-X)+(D-X)}/2, where D is the bank width, and X, Xare the widths running on the bank of the ink sumps 1060R, 1060B.
申请公布号 JP2013172060(A) 申请公布日期 2013.09.02
申请号 JP20120035981 申请日期 2012.02.22
申请人 PANASONIC CORP 发明人 MIYOSHI TAKAYUKI
分类号 H01L51/50;B05C5/00;B05D1/26;B05D7/00;H01L21/336;H01L29/786;H05B33/10 主分类号 H01L51/50
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