发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device which makes it easy to reliably connect a plug conductive layer and a wiring layer in an upper layer of the plug conductive layer, and which can inhibit collapse of a distribution line.SOLUTION: A semiconductor device comprises: a plug conductive layer PL contacts a source/drain region SD formed on a principal surface of a semiconductor substrate SUB; a contact conductive layer CTC formed in contact with both of a top face and a lateral face of the plug conductive layer PL; and wiring layers BL, /BL, GND formed on the contact conductive layer CTC so as to be electrically connected with the contact conductive layer CTC.
申请公布号 JP2013172090(A) 申请公布日期 2013.09.02
申请号 JP20120036511 申请日期 2012.02.22
申请人 RENESAS ELECTRONICS CORP 发明人 MAKI YUKIO
分类号 H01L23/522;H01L21/768;H01L21/8242;H01L21/8244;H01L27/10;H01L27/108;H01L27/11 主分类号 H01L23/522
代理机构 代理人
主权项
地址