| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas environmental cell holder capable of washing an electron microscope partition wall without damaging the partition wall and oxidizing a majority of its surface.SOLUTION: A holder assembly comprises: an electron microscope partition wall cooperating with an electron microscope having a gas environmental cell 101 with a fluid flow inlet and a vacuum wall isolating a portion that can be exhausted from the outside, and constituting a sealing body contacting the electron microscope; a gas environmental cell partition wall constituting a sealing body contacting the fluid flow inlet of the gas environmental cell; a pipe connecting a fluid supply part and the fluid flow inlet of the gas environmental cell; and a first member 122 and a second member 121. The first member can be removed from the second member, and has the pipe and the partition wall of the gas environmental cell. The second member has the partition wall of the electron microscope. The first member can be cleaned at a high temperature without exposing the second member to a high temperature. Clogging of the pipe can be relaxed by reducing carbon, so as to hold the other second member under a cooling state. The cleaning can be enhanced by blowing, for example, oxygen or hydrogen through the pipe. |
