GYRO SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a biaxial gyro sensor oscillator having excellent performance and high accuracy by giving optimal shape and structure to an integrated gyro sensor oscillator.SOLUTION: A gyro sensor comprises an oscillator including six oscillating legs arrayed radially in parallel with one plane while each forming an angle of 60° mutually from one common base part. The six legs are bent and oscillated within a plane normally, flexing deformation generated in the six oscillating legs vertically to the plane by Coriolis forces generated by rotation around a rotation axis in parallel with the plane is detected and out-of-plane flexing deformation of each leg is calculated, thereby outputting a direction of the rotation axis estimated parallel to the plane and a magnitude of an angular velocity. Furthermore, it is preferable to bend and oscillate neighboring legs so as to be opposed to each other.