| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor element, a manufacturing method of a sensor element, and a sensor device, which allow excellent detection sensitivity to be easily and reliably exhibited; and a highly reliable electronic apparatus having the sensor device.SOLUTION: A sensor element includes a base 21, vibration arms 22 and 23 extending from the base 21, drive parts 51 to 54 which are disposed at the vibration arms 22 and 23, detectors 55 and 56 which are disposed at the vibration arms 22 and 23, and adjustment parts 57 and 58 which are disposed at the vibration arms 22 and 23 and generate electric charges with a polarity opposite to the electric charges generated from the detection parts 55 and 56 when no physical quantity is applied to the vibration arms 22 and 23. The adjustment parts 57 and 58 include a first electrode layer, a second electrode layer, and a piezoelectric layer. The second electrode layer of the adjustment parts 57 and 58 includes a common part 60 disposed along the extending direction of vibration arms 22 and 23 and a plurality of branch parts 61 diverged from the common part 60. |
