| 摘要 |
PROBLEM TO BE SOLVED: To provide a scribing device capable of solving, in advance, problems arising from the occurrence of complete segmentation during processing in a scribing step.SOLUTION: A scribing device 1 includes at least either an upper cutter wheel 2 for processing a scribe line on a top surface of a brittle material substrate M to be processed, or a lower cutter wheel 3 for processing a scribe line on a bottom surface of the substrate M, and is provided with a displacement detecting mechanism 7 that, with a surface of the brittle material substrate M on which scribe lines S1 and S2 are formed as a substrate reference surface R1 or R2, detects the displacement when at least a portion of the substrate M is displaced towards the cutter wheel 2 side from the substrate reference surface. |
