FEEDBACK CONTROL AND COHERENCY OF MULTIPLE POWER SUPPLIES IN RADIO FREQUENCY POWER DELIVERY SYSTEMS FOR PULSED MODE SCHEMES IN THIN FILM PROCESSING

摘要

PURPOSE: A feedback control and coherency of a multi-power supply device in radio frequency power transmission systems for pulsed mode schemes in a thin film process maximize power transmission by controlling energy transmitted to the radio frequency transmission system. CONSTITUTION: A power amplifier (28) outputs a radio frequency signal to a load. A sensor (32) monitors the radio frequency signal and generates a sensor signal based on the radio frequency signal. An energy detection circuit determines the energy of the radio frequency signal according to the sensor signals. A power amplifier energy control circuit generates a control signal to change the radio frequency signal according to the energy determined by the energy detection circuit. [Reference numerals] (14) Load; (18) Matching network; (28) Power amplifier; (40,52) Power determination module; (42,56) Scaling module; (46) Power control module; (54) Filter module; (58) Energy control module; (64) Energy setting value module; (68) External energy setting value module; (70) Power setting value module; (AA) Power supply; (BB) Sensors