SCRIBING APPARATUS OF BRITTLE MATERIAL SUBSTRATE

摘要

PURPOSE: A scribe apparatus of a brittle material substrate is provided to perform the maintenance when abnormality is detected by extracting the partial displacement of the substrate with a displacement detecting device, and to check damages on the blade edge of a cutter wheel. CONSTITUTION: A scribe apparatus (1) of a brittle material substrate includes at least one part from an upper cutter wheel (2) or a lower cutter wheel (3). The scribe apparatus includes a displacement detecting device (7). The displacement detecting device detects the displacement when parts of a substrate are displaced from substrate reference surfaces (R1, R2) toward a cutter wheel. The substrate reference surfaces are the surfaces for forming a scribe line of the brittle material substrate (M). The cutter wheel is formed of the upper cutter wheel and the lower cutter wheel, and performs the processing of the scribe line on the upper and lower surfaces. The displacement detecting device detects the displacement right above or right below the scribe line.