| 摘要 |
<p>PURPOSE: A transfer device is provided to improve productivity by transferring a plurality of substrates accepted in a cassette to a stage within fast time and to reduce an installation space. CONSTITUTION: A horizontal direction guide member(200) is included in a body frame(100). A horizontal direction movement frame(300) is combined according to the horizontal direction guide member that may be moved. A horizontal direction driving unit(400) drives the horizontal direction movement frame. A top and bottom direction movement member(500) is combined according to the horizontal direction guide member that may be moved. A top and bottom direction driving unit(600) drives the top and bottom direction movement member. An absorption member is combined to the top and bottom direction movement member that may be rotated.</p> |
