发明名称 OPTICAL DISPLACEMENT METER
摘要 PROBLEM TO BE SOLVED: To provide an optical displacement meter capable of measuring displacement of a desired portion of a measuring object, with or without independent change of positions of a plurality of portions of the measuring object.SOLUTION: A master profile shape being a reference of a profile shape of a work-piece W is displayed on a display 300. By an operation of a user, a plurality of correction frames are set to have the master profile shape, and a measurement frame is set on the display 300 so as to be associated with one of the plurality of correction frames. While measuring the work-piece W, positional deviation of the profile shape from the master profile shape inside the correction frame associated with the measurement frame is calculated according to master profile data and profile data. The position of the measurement frame is corrected based on the calculated positional deviation, and measurement processing is performed using profile data indicating a portion of the profile shape inside the corrected measurement frame.
申请公布号 JP2013170838(A) 申请公布日期 2013.09.02
申请号 JP20120033092 申请日期 2012.02.17
申请人 KEYENCE CORP 发明人 SATOYOSHI HIROYUKI
分类号 G01B11/24;G01B11/00 主分类号 G01B11/24
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