| 摘要 |
PROBLEM TO BE SOLVED: To provide a bonding wire which ensures a stabilized shape of small variation not protruding from an electrode during wire bonding.SOLUTION: The production method of a bonding wire includes a wire drawing step for passing a thin metallic wire 10 through a plurality of dies and drawing up to a predetermined wire size, and an annealing step for passing the thin metallic wire subjected to wire drawing through an anneal furnace 120 and annealing the thin metallic wire. In the annealing step, the thin metallic wire subjected to annealing is irradiated with atmospheric pressure plasma so as to clean the surface of the thin metallic wire. |
