INSPECTION DEVICE AND INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a technique for inspecting a semiconductor element by causing the generation of electromagnetic waves at low cost.SOLUTION: An inspection device 100 includes an irradiation unit 12 that has: wavelength variable lasers 121 and 121 that emit two laser beams having different wavelengths; and a coupler 123 that mixes those laser beams. The inspection device 100 also includes: a detection unit 13 that detects electromagnetic waves that are generated from a solar battery panel 90 according to irradiation of the two laser beams which have been mixed by the coupler 123; and a wavelength change unit 23 that changes the wavelength of laser beams which are emitted by either or both of the wavelength variable lasers 121 and 121 according to the magnitude of a band gap of the solar battery panel 90.