| 摘要 |
<p>FLOW RATE MEASUREMENT DEVICE AND FLOW RATE MEASUREMENT METHOD FOR FLOW RATE CONTROLLER FOR GAS SUPPLY DEVICETo realize quicker and more accurate flow rate measurement of a flow rate controller for a gas supply device, and structural simplification and downsizing of a flow rate measurement device to be used for measurement. A flow rate measurement device includes a branched pipe passage Lb having an inlet side end portion to be detachably joined in a branched manner to an upstream portion of an on-off valve Vo provided on an outlet end portion of a gas supply line L, and an outlet side end portion of the branched pipe passage Lb to be joined to a gas flow-out side, an on-off valve V provided on the outlet side of the branched pipe passage Lb, a pressure detector Pd and a temperature detector Td that detect a gas pressure and a gas temperature on the upstream side of the on-off valve V, and an arithmetic operation control device CP into which detection signals from the pressure detector Pd and the temperature detector Td are input and which arithmetically calculates a gas flow rate of the gas flowing in the branched pipe passage Lb, and the flow rate measurement device is detachably joined in a branched form to the upstream portion of the on-off valve Vo provided on the outlet end portion of the gas supply line L of a gas supply device GF.Figure 1</p> |
