MEMS DEVICES HAVING SUPPORT STRUCTURES AND METHODS OF FABRICATING THE SAME,申请号HK20080112170-传众专利搜索

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发明名称	MEMS DEVICES HAVING SUPPORT STRUCTURES AND METHODS OF FABRICATING THE SAME
摘要
申请公布号	HK1117131(A1)	申请公布日期	2013.08.30
申请号	HK20080112170	申请日期	2008.11.06
申请人	QUALCOMM MEMS TECHNOLOGIES INC.	发明人	CHUI, CLARENCE;CHUNG, WONSUK;GANTI, SURYA, PRAKASH;KOTHARI, MANISH;MILES, MARK, W.;SAMPSELL, JEFFREY, B.;SASAGAWA, TERUO
分类号	B81B;G02B	主分类号	B81B
代理机构		代理人
主权项
地址

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