发明名称 |
INTEGRATED CIRCUIT SYSTEM INCLUDING NITRIDE LAYER TECHNOLOGY |
摘要 |
<p>An integrated circuit method for manufacturing an integrated circuit system including loading a wafer into a processing chamber and pre-purging the processing chamber with a5 first ammonia gas. Depositing a first nitride layer over the wafer and purging the processing chamber with a second ammonia gas. Depositing a second nitride layer over the first nitride layer that is misaligned with the first nitride layer. Post-purging the processing chamber with a third ammonia gas and purging the processing chamber with a nitrogen gas.10 Fig.18</p> |
申请公布号 |
SG192473(A1) |
申请公布日期 |
2013.08.30 |
申请号 |
SG20130051792 |
申请日期 |
2007.07.04 |
申请人 |
GLOBALFOUNDRIES SINGAPORE PTE. LTD. |
发明人 |
SRIPAD SHESHAGIRI NAGARAD;KOH HWA WENG;SOHN DONG KYUN;CHEN XIAOYU;LOUIS LIM;JUNG SUNG MUN;YAP CHIEW WAH;PRADEEP RAMACHANDRAMURTHY YELEHANKA;NITIN KAMAT |
分类号 |
|
主分类号 |
|
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|