Imaging optics used in optical system of projection exposure apparatus, has object plane arranged parallel to image plane, having aspherical, rotationally symmetrical mirror whose axis of symmetry is not perpendicular to object plane

摘要

The imaging optics (7) comprises an object plane (5) which is arranged parallel to the image plane (9), and has an aspherical, rotationally symmetrical mirror whose axis of symmetry is not perpendicular to the object plane. The mirror has a through-opening for the passage of imaging light (3). The reflecting surface of the mirror leads around the through-opening to the reflection of imaging light. An intermediate image is formed in the image beam path between the object field (4) and image field (8). An independent claim is included for a method for producing a structured component.