发明名称 ELECTRICAL CONNECTION DEVICE AND ITS ASSEMBLING METHOD
摘要 PROBLEM TO BE SOLVED: To provide an electrical connection device and its assembling method which does not require complicated adjustment work requiring skills for replacement of a probe substrate.SOLUTION: The electrical connection device includes: a wiring board which is coupled to a reinforcing plate on one surface and which is provided with a first electric connection part on an opposite surface; a probe substrate which is provided with a second electric connection part corresponding to the electric connection part on one surface and a probe electrically connected to the second electric connection part on the other surface respectively; an anchor part which is formed on one surface of the probe substrate and which is provided with screw holes opening upward; a cylindrical spacer of which one end is detachably coupled to a top surface of the corresponding respective anchor part, and of which a thread groove is formed on an inner peripheral surface of the other end, and which penetrates the wiring board and the reinforcing plate; a reference plate which includes a reference surface for receiving the other end of each cylindrical spacer, and which is detachably coupled to the reinforcing plate; a plurality of shims inserted between each reference plate and the reinforcing plate; and a bolt having a shaft part which penetrates reference plate and the corresponding shim and of which a tip is screwed into the thread groove of the cylindrical spacer.
申请公布号 JP2013167461(A) 申请公布日期 2013.08.29
申请号 JP20120029211 申请日期 2012.02.14
申请人 MICRONICS JAPAN CO LTD 发明人 TANAKA KENTARO
分类号 G01R1/073;H01L21/66 主分类号 G01R1/073
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