发明名称 |
PROBE CARD AND MANUFACTURING METHOD THEREOF |
摘要 |
PROBLEM TO BE SOLVED: To provide a probe card which ensures excellent high frequency characteristics while achieving a narrow pitch of probe needles.SOLUTION: A probe card 1 includes: a coaxial cable 3 extending from an input side to an output side; a prove needle 4 which is connected with the coaxial cable 3 and extends from it and whose distance from other probe needles 4 becomes shorter toward the output side; and a coaxial tube 6 which covers the prove needle 4 and which has a smaller diameter than the coaxial cable 3. |
申请公布号 |
JP2013167503(A) |
申请公布日期 |
2013.08.29 |
申请号 |
JP20120030326 |
申请日期 |
2012.02.15 |
申请人 |
TOKYO CATHODE LABORATORY CO LTD |
发明人 |
SEGAMI YASUSHI;MIYAMOTO DAISUKE;HONDA HIDEKAZU;NISHIJIMA TERUHIKO;BANYA KEIKO |
分类号 |
G01R1/073;G01R31/26;H01L21/66 |
主分类号 |
G01R1/073 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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