发明名称 LIGHTING METHOD AND MICROSCOPIC OBSERVATION DEVICE
摘要 <p>Illumination of a sample surface (23) is carried out by standing waves which are generated by generating two-beam planar waves (41, 51) using light from a light source unit (30) by means of planar wave lighting units (40, 50) for standing waves and by making the two-beam planar waves (41, 51) that have been generated interfere on the sample surface (23). Furthermore, bias planar waves (61) are generated by a bias planar wave lighting unit (60) using light from the light source unit (30) and lighting of the sample surface (23) is carried out by the bias planar waves (61) that are generated, said bias planar waves: being synchronized with the standing waves so that, with a reference time at which the value for electric field displacement of the standing waves at each position on the sample surface (23) is 0 being made a boundary, the electric field displacement of the standing waves swing alternately to the positive side and negative side with the same displacement regardless of the positions on the sample surface (23); and oscillating at a bias amplitude (amplitude of a value (2A) identical with the standing wave), which is determined in advance as an amplitude that increases the standing wave electric field displacement until the displacement is either on the positive side only or the negative side only on the sample surface (23).</p>
申请公布号 WO2013125723(A1) 申请公布日期 2013.08.29
申请号 WO2013JP54821 申请日期 2013.02.25
申请人 THE UNIVERSITY OF TOKYO;NATIONAL UNIVERSITY CORPORATION SHIZUOKA UNIVERSITY;TAKAHASHI, SATORU;TAKAMASU, KIYOSHI;KUDO, RYOTA;USUKI, SHIN 发明人 TAKAHASHI, SATORU;TAKAMASU, KIYOSHI;KUDO, RYOTA;USUKI, SHIN
分类号 G02B21/06;G01N21/956;H01L21/66 主分类号 G02B21/06
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