发明名称 TEST SUPPORTING METHOD, LOADING METHOD, TURN OVER BUFFER APPARATUS AND CARRIER BOARD TURN APPARATUS OF HANDLING SYSTEM FOR SUPPORTING TEST OF DIE
摘要 A test supporting method, loading method, turn over buffer apparatus and carrier board turn apparatus of handling system for supporting test of die are provided to make a stable electric contact of a die and a socket by preventing the separation of die from the carry board. In an A-step, a die which is puts on a wafer is turned by 180 degrees(S1712). In a B-stage, loads the rotated die through the A-step to the carrier board(S1713). In a C-stage, the carrier board which is loaded completely is turned by 180 degrees(S1720). In a D step, a test for the die loaded on the carry board by making the die loaded in the carry board contact with a tester electrically(S1730). In an E-step, the die which is tested completely is unloaded from the carry board(S1740).
申请公布号 KR101301619(B1) 申请公布日期 2013.08.29
申请号 KR20080001456 申请日期 2008.01.04
申请人 发明人
分类号 H01L21/66 主分类号 H01L21/66
代理机构 代理人
主权项
地址