| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical filter device and a method for manufacturing an optical filter device capable of suppressing warpage of a reflection film in an interference filter.SOLUTION: An optical filter device 600 comprises: an interference filter 5; and a casing 601. The interference filter 5 includes a fixed substrate 51, a movable substrate 52 joined with the fixed substrate 51, a fixed reflection film disposed on the fixed substrate 51, and a movable reflection film disposed on the movable substrate 52 and opposing to the fixed reflection film through an inter-reflection film gap. The casing 601 includes a base substrate 610 where the interference filter 5 can be disposed. A fixing member 7 is disposed between the movable substrate 52 and the base substrate 610. In a plan view of the movable substrate 52 observed in a thickness direction of the substrate, the movable substrate 52 is fixed by the fixing member 7 to the base substrate 610 in a single portion except for a region where the movable reflection film is disposed. |
