SELF-ASSEMBLED STRUCTURE, METHOD OF MANUFACTURE THEREOF, AND ARTICLE COMPRISING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide self-assembled structures that have lamellae or cylinders whose longitudinal axis is parallel or perpendicular to a surface upon which the self assembled structure is disposed.SOLUTION: A method of forming a pattern, comprises: disposing a block copolymer comprising a siloxane-containing block and a non-siloxane containing block, on a surface of a substrate having a random copolymer disposed thereon, the random copolymer having a total surface energy of 15 to 400 milliNewtons per meter and comprising at least one substituent that comprises a fluorine atom; annealing the block copolymer to phase-separate regions containing the siloxane containing block from those containing the non-siloxane containing block; and etching the block copolymer to selectively remove either the region containing the siloxane-containing block or the non-siloxane containing block.