发明名称 NON-VOLATILE STORAGE DEVICE AND MANUFACTURING METHOD THEREFOR
摘要 <p>A resistance-changing layer (103) has a first resistance-changing layer (103a) including an oxygen-deficient first metal oxide and a second resistance-changing layer (103b) including an oxygen-deficient second metal oxide different from the first metal oxide. The second resistance-changing layer (103b) includes a non-metallic element (A) other than oxygen. When the composition of the first resistance-changing layer (103a) is represented by MOx, and the composition of the second resistance-changing layer (103b) is represented by NOyAz, the equation x < (y+z) is satisfied, the resistivity of the second resistance-changing layer (103b) is greater than the resistivity of the first resistance-changing layer (103a), and the film density of the second resistance-changing layer (103b) is less than the theoretical film density of the stoichiometric composition of the second metal oxide.</p>
申请公布号 WO2013125172(A1) 申请公布日期 2013.08.29
申请号 WO2013JP00753 申请日期 2013.02.13
申请人 PANASONIC CORPORATION 发明人 FUJII, SATORU;MIKAWA, TAKUMI
分类号 H01L27/105;C23C14/34;C23C16/40;H01L45/00;H01L49/00 主分类号 H01L27/105
代理机构 代理人
主权项
地址