发明名称 |
NON-VOLATILE STORAGE DEVICE AND MANUFACTURING METHOD THEREFOR |
摘要 |
<p>A resistance-changing layer (103) has a first resistance-changing layer (103a) including an oxygen-deficient first metal oxide and a second resistance-changing layer (103b) including an oxygen-deficient second metal oxide different from the first metal oxide. The second resistance-changing layer (103b) includes a non-metallic element (A) other than oxygen. When the composition of the first resistance-changing layer (103a) is represented by MOx, and the composition of the second resistance-changing layer (103b) is represented by NOyAz, the equation x < (y+z) is satisfied, the resistivity of the second resistance-changing layer (103b) is greater than the resistivity of the first resistance-changing layer (103a), and the film density of the second resistance-changing layer (103b) is less than the theoretical film density of the stoichiometric composition of the second metal oxide.</p> |
申请公布号 |
WO2013125172(A1) |
申请公布日期 |
2013.08.29 |
申请号 |
WO2013JP00753 |
申请日期 |
2013.02.13 |
申请人 |
PANASONIC CORPORATION |
发明人 |
FUJII, SATORU;MIKAWA, TAKUMI |
分类号 |
H01L27/105;C23C14/34;C23C16/40;H01L45/00;H01L49/00 |
主分类号 |
H01L27/105 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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