| 摘要 |
PROBLEM TO BE SOLVED: To accurately detect a defect part.SOLUTION: An imaging unit picks up an image of an inspection target and generates image data, a smoothing unit spatially smoothes a signal value included in the image data and generates reference value data, a first defect information generation unit detects a first defect part from the image data on the basis of the reference value data and a predetermined first detection condition, an image information storage unit correspondingly stores defect-including image data including an image of the detected first defect part and the reference value data used for detecting the first defect part, and a second defect information generation unit detects a second defect part from the defect-including image data on the basis of the reference value data and a second detection condition. |
