发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 Provided is a semiconductor device having a vertical MOS transistor and a method of manufacturing the same. The vertical MOS transistor has a trench gate, a distance between a gate electrode and an N-type high concentration buried layer below the gate electrode is formed longer than that in the conventional structure, and a P-type trench bottom surface lower region (5) is formed therebetween. In this manner, when a high voltage is applied to a drain region and 0 V is applied to the gate electrode, the trench bottom surface lower region (5) is depleted, thereby increasing the breakdown voltage in the OFF state.
申请公布号 US2013221432(A1) 申请公布日期 2013.08.29
申请号 US201313761304 申请日期 2013.02.07
申请人 SEIKO INSTRUMENTS INC.;SEIKO INSTRUMENTS INC. 发明人 MINAMI YUKIMASA
分类号 H01L29/78;H01L29/66 主分类号 H01L29/78
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