METHOD FOR REFINING TRIMETHYLSILANE

摘要

Provided is a method for refining trimethylsilane which comprises (1) a step of preparing an activated carbon impregnated with at least copper oxide (II) and zinc oxide, (2) a step of adsorbing trimethylsilane to the activated carbon, and (3) a step of contacting trimethylsilane which contains silane, methylsilane or dimethylsilane as an impurity with the activated carbon that has undergone the step (2) and adsorbing the impurity thereto in order to remove the impurity from the trimethylsilane. According to this method, generation of heat from the activated carbon is suppressed and impurities such as dimethylsilane can be removed efficiently.