发明名称 SEMICONDUCTOR-DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE
摘要 Provided are a semiconductor device and semiconductor-device manufacturing method that make it possible to improve the contact between an insulating film and a wiring member and the reliability thereof. This method for manufacturing a semiconductor device (100) includes a step in which a CF film (106) is formed on top of a semiconductor substrate (102), a step in which grooves (C) corresponding to a wiring pattern (P) are formed in the CF film (106), and a step in which a copper wiring member (114) is embedded in the grooves (C).
申请公布号 WO2013125647(A1) 申请公布日期 2013.08.29
申请号 WO2013JP54380 申请日期 2013.02.21
申请人 TOKYO ELECTRON LIMITED;ZEON CORPORATION;TOHOKU UNIVERSITY 发明人 NEMOTO TAKENAO;SAITO TAKEHISA;TOMITA YUGO;MATSUMOTO HIROKAZU;SHIROTORI AKIHIDE;TERAMOTO AKINOBU;GU XUN
分类号 H01L21/768;H01L21/3205;H01L21/321;H01L23/522;H01L23/532 主分类号 H01L21/768
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