| 摘要 |
A method for producing a probe card is provided to manufacture a probe card having a minute pitch by forming a probe tip with the minute tip corresponding to various circuit patterns by forming one probe tip or more by using a pattern generated by etching and removing after laminating a photoresist layer on one trench as a mask. A trench is formed by etching and removing a predetermined region of a sacrificial substrate(100). A photoresist layer(140) is formed by coating a photosensitive material on the sacrificial substrate to fill the trench. The photoresist layer is exposed by using a mask exposing the region corresponding to the probe body part(150) to include a part of the region formed on the trench. A mold for the probe body part is formed by etching and removing the region corresponding to the probe body part including the partial region of the trench in the photoresist layer. The probe body part is formed by using a conductive material in the mold. |
