| 摘要 |
PROBLEM TO BE SOLVED: To provide a cooling chamber that cools objects while observing a determined cycle time and suppresses an increase in installation space for the chamber.SOLUTION: A cooling unit having a plurality of cooling members in a stack to cool objects placed between the cooling members is provided to simultaneously cool a plurality of objects placed in a vertical direction. This suppresses an increase in installation space for the cooling chamber. A control section for controlling the timing of vertically moving the cooling unit, the timing of delivering the objects into the cooling unit and the timing of delivering the objects out of the cooling unit is also provided to vertically move the cooling unit to a predetermined position and controlling the timing of delivering the objects in and out. This cools the objects while observing a determined cycle time. |
