| 摘要 |
<p>PURPOSE: A surface plate unit, in which the position of a glass substrate for heating process of the surface plate of the ceramic can be determined based on the positioning pin of the metal material, has a simple configuration so that surface plate unit can be produced at low costs. CONSTITUTION: A surface plate unit includes a surface plate (3) of the ceramic in which a glass substrate (2) for heating process is mounted on the top of the surface plate, multiple loose holes (4) arranged in a spot for determining the position of glass substrate of the surface plate and formed as a though-hole shape in the longitudinal direction of the surface plate, multiple positioning pins of metal materials (5) loosely inserted in the loose holes and a connecting medium connecting the multiple positioning pins with each other on the surface plate to maintain the projecting state of the positioning pins from the loose holes to the surface plate. In order to determine where a corner of the glass substrate is located, the connecting medium connects the multiple positioning pins with each other arranged with the corner of the glass substrate between the positioning pins, avoiding the corner of the glass substrate.</p> |
