发明名称 MIRROR DRIVING DEVICE AND METHOD OF CONTROLLING THE DEVICE
摘要 PROBLEM TO BE SOLVED: To obtain a large deflection angle, suppress influences due to initial warpage or the like, and achieve a high-speed response, suppression of a disturbance influence, and decrease of an element size.SOLUTION: A mirror driving device includes: a mirror part (12) having a reflection surface (12B); mirror support parts (15, 25) formed at portions of the mirror part (12) diagonal to each other; and a first actuator (14) and a second actuator (24) placed so as to surround the mirror part (12). The first actuator (14) and the second actuator (24) each have a structure in which a plurality of first piezoelectric cantilevers (16-1, 16-2, 26-1, 26-2) with a longitudinal direction oriented to a first axis direction and a plurality of second piezoelectric cantilevers (17-1, 17-2, 27-1, 27-2) with a longitudinal direction oriented to a second axis direction are coupled together so as to be folded, and each of the first actuator (14) and the second actuator (24) has one end connected to the mirror part (12) via the mirror support parts (15, 25) and another end connected to fixing parts (31, 32) near the mirror support parts (15, 25).
申请公布号 JP2013167681(A) 申请公布日期 2013.08.29
申请号 JP20120029444 申请日期 2012.02.14
申请人 FUJIFILM CORP 发明人 NAONO TAKAYUKI
分类号 G02B26/10;B81B3/00;C23C14/34;H01L41/09;H01L41/18;H01L41/187;H01L41/22;H01L41/39 主分类号 G02B26/10
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