发明名称 CHIP MOUNTING METHOD AND CHIP MOUNTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a mounting device and a mounting method in which highly precise mounting operation in a manufacturing process of a chip laminated body can be achieved at low cost.SOLUTION: After a chip 1 is picked up by a collet 3 in a pickup position, a chip rear surface image is acquired by a chip recognition camera 6 which has recognized the chip 1 in the pickup position through a reflective inverse mechanism 21, in an eccentricity quantity detection position which is shifted from the pickup position. Then, the collet 3 which sucks the chip 1 is rotated for a predetermined angle in the eccentricity quantity detection position. In this status, the chip rear surface image is acquired again by the chip recognition camera 6 through the reflective inverse mechanism 21. Afterward, a rotation eccentricity quantity of the chip 1 is calculated using chip rear surface image data acquired before the rotation and chip rear surface image data acquired after the rotation.
申请公布号 JP2013168566(A) 申请公布日期 2013.08.29
申请号 JP20120031775 申请日期 2012.02.16
申请人 CANON MACHINERY INC 发明人 NAKATSU AKIRA
分类号 H01L21/52 主分类号 H01L21/52
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