发明名称
摘要 Certain embodiments described herein are directed to devices that can be used to sustain a low flow plasma. In certain examples, the low flow plasma can be sustained in a torch comprising an outer tube and an auxiliary tube within the outer tube. In some examples, the auxiliary tube comprises an effective length to match the shape of a low flow plasma sustained in the torch using a flat plate electrode. Methods and systems using the torches are also described.
申请公布号 JP2013534022(A) 申请公布日期 2013.08.29
申请号 JP20130509202 申请日期 2011.05.04
申请人 发明人
分类号 H05H1/30;G01N21/68;G01N21/73;H01J49/10;H05H1/42 主分类号 H05H1/30
代理机构 代理人
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