| 摘要 |
<p>The method involves irradiating laser light into a zinc oxide layer (2) with a layer plane with variable intensities such that an intensity entry is produced in the zinc oxide layer. A corrodingability variable in the layer plane is produced by the intensity entry based on irradiated intensity. The zinc oxide layer is corroded with acid such that a ditched recess (3) is formed into the zinc oxide layer. The irradiating process with a pulsed laser is taken place in a UV or infrared spectral region with wavelengths of 193 Nm, 248 Nm, 266 Nm, 308 Nm, 355 Nm or 1064 Nm. The acid is hydrochloric acid, hydrofluoric acid, sulfuric acid, phosphorus acid, nitric acid, citric acid or organic acid. Independent claims are also included for the following: (1) a zinc oxide layer (2) a layered structure.</p> |
