CHARGED PARTICLE BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a charged particle beam device capable of selecting proper pre-processing conditions in performing automatic brightness and contrast adjustment.SOLUTION: There is provided a charged particle beam device including: a plurality of noise elimination filters which eliminate noise of an electric signal; a measurement section which measures a contrast noise ratio after applying one of the noise elimination filters; and a determination section which determines magnitude between the contrast noise ratio measured by the measurement section and a preset threshold.